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News says Canon plans to increase the production capacity of its back-end lithography machines by 50% by 2029
The Block
1h ago
Ai Focus
According to the report by Nikkei Industrial News, Canon plans to increase its lithography machine production capacity for semiconductor back-end processes by 50% by 2029 compared to the current level. The company is also developing i-line lithography equipment for advanced packaging processes and has launched large-size substrate lithography machines that can handle substrates of 510×515 millimeters.
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News from the home of IT on October 21st: According to a report by the Japanese media "Nikkei Industrial News" yesterday local time, Canon (Canon) plans to increase its lithography machine production capacity for semiconductor back-end processes by 50% by 2029 compared to the current level.

Canon is developing i-line lithography equipment for advanced packaging processes. The company has also developed a large-size substrate lithography machine with a resolution of 0.8μm (800nm), capable of processing substrates measuring 510×515 millimeters, and features high alignment precision and a wide field of view.

In an interview, Sanpei Mitamura, the person in charge of Canon's Semiconductor Equipment Division, stated that the maskless direct writing patterning solution is not currently a direct competitor to i-line lithography machines in the RDL production field.

Related Reading:

Canon Establishes a New Lithography Machine Factory After 21 Years, Focusing on the Demand for Non-Advanced Machines (August 5, 2025)

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